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Fabrication and characterization of large arrays of mesoscopic gold rings on large-aspect-ratio cantilevers

机译:介观金的大阵列的制作和表征   大纵横比悬臂上的环

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摘要

We have fabricated large arrays of mesoscopic metal rings on ultrasensitivecantilevers. The arrays are defined by electron beam lithography and contain upto $10^5$ rings. The rings have a circumference of 1 $\mu$m, and are made ofultrapure (6N) Au that is deposited onto a silicon-on-insulator wafer withoutan adhesion layer. Subsequent processing of the SOI wafer results in each arraybeing supported at the end of a free-standing cantilever. To accommodate thelarge arrays while maintaining a low spring constant, the cantilevers arenearly 1 mm in both lateral dimensions and 100 nm thick. The extreme aspectratio of the cantilevers, the large array size, and the absence of a stickinglayer are intended to enable measurements of the rings' average persistentcurrent $\langle I \rangle$ in the presence of relatively small magneticfields. We describe the motivation for these measurements, the fabrication ofthe devices, and the characterization of the cantilevers' mechanicalproperties. We also discuss the devices' expected performance in measurementsof $\langle I \rangle$.
机译:我们在超灵敏悬臂上制造了许多介观金属环。这些阵列是通过电子束光刻技术定义的,并包含多达$ 10 ^ 5 $个环。这些环的周长为1μm,由超纯(6N)Au制成,该金沉积在没有粘附层的绝缘体上硅晶片上。 SOI晶圆的后续处理导致每个阵列都支撑在独立悬臂的末端。为了容纳较大的阵列同时保持较低的弹簧常数,悬臂的横向尺寸均接近1 mm,厚度为100 nm。悬臂的极端长宽比,较大的阵列尺寸以及不存在粘附层的目的是使得能够在存在相对较小的磁场的情况下测量环的平均持续电流。我们描述了进行这些测量的动机,设备的制造以及悬臂的力学性能的表征。我们还将讨论在$ \ langle I \ rangle $测量中设备的预期性能。

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